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Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane
引用本文:陈明君,梁迎春,袁屹杰,李 旦.Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane[J].中国物理 B,2008,17(11):4260-4267.
作者姓名:陈明君  梁迎春  袁屹杰  李 旦
作者单位:Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China;Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China;Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China;Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
基金项目:Project supported by New Century Elitist Supporting Program Foundation by the Ministry of Education of China\par (Contract No NCET-06-0332) and the National Natural Science Foundation of China (Grant No 50405011).
摘    要:The Brenner-LJ potential is adopted to describe the interaction between C36 clusters and diamond surface, and the deposition mechanism of multi-C36 clusters on the diamond surface is also studied by using the method of molecular dynamics simulation. The simulation results show that the competition effects of two interactions, i.e. the interaction between cluster and cluster and the interaction between cluster and crystal plane, are studied, and then the influence of these competition effects on C36 cluster deposition is analysed. The finding is that when an incident energy is appropriately chosen, C36 clusters can be chemically adsorbed and deposited steadily on the diamond surface in the form of single-layer, and in the deposition process the multi-C36 clusters present a phenomenon of energy transmission. The experimental result shows that at a temperature of 300K, in order to deposit C36 clusters into a steady nanostructured single-layered film, the optimal incident energy is between 10 and 18 eV, if the incident energy is larger than 18 eV, the C36 clusters will be deposited into an island nano-structured film.

关 键 词:单层碳膜  纳米材料  纳米结构  沉积机制
收稿时间:2008-03-19

Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane
Chen Ming-Jun,Liang Ying-Chun,Yuan Yi-Jie and Li Dan.Deposition mechanism of nano-structured single-layered C36 film on a diamond (100) crystal plane[J].Chinese Physics B,2008,17(11):4260-4267.
Authors:Chen Ming-Jun  Liang Ying-Chun  Yuan Yi-Jie and Li Dan
Affiliation:Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
Abstract:The Brenner--LJ potential is adopted to describe the interaction between CCC$_{36}$ clusters, Brenner--LJ potential, nano-structured single-layered film, competition effectProject supported by New Century Elitist Supporting Program Foundation by the Ministry of Education of China\par (Contract No NCET-06-0332) and the National Natural Science Foundation of China (Grant No 50405011).6148, 6185, 4630, 0630MThe Brenner--LJ potential is adopted to describe the interaction between C$_{36}$ clusters and diamond surface, and the deposition mechanism of multi-C$_{36}$ clusters on the diamond surface is also studied by using the method of molecular dynamics simulation. The simulation results show that the competition effects of two interactions, i.e. the interaction between cluster and cluster and the interaction between cluster and crystal plane, are studied, and then the influence of these competition effects on C$_{36}$ cluster deposition is analysed. The finding is that when an incident energy is appropriately chosen, C$_{36}$ clusters can be chemically adsorbed and deposited steadily on the diamond surface in the form of single-layer, and in the deposition process the multi-C$_{36}$ clusters present a phenomenon of energy transmission. The experimental result shows that at a temperature of 300K, in order to deposit C$_{36}$ clusters into a steady nano-structured single-layered film, the optimal incident energy is between 10 and 18\,eV, if the incident energy is larger than 18\,eV, the C$_{36}$ clusters will be deposited into an island nano-structured film.
Keywords:CC$_{36}$ clusters  Brenner--LJ potential  nano-structured single-layered film  competition effect
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