| 钽酸锂薄膜红外探测器探测性能的模拟研究 |
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| 引用本文： | 罗文田,张德银,彭卫东,张熙.钽酸锂薄膜红外探测器探测性能的模拟研究[J].半导体光电,2010,31(1):60-63. |
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| 作者姓名： | 罗文田 张德银 彭卫东 张熙 |
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| 作者单位： | 中国民航飞行学院航空工程学院,四川,广汉,618307;中国民航飞行学院航空工程学院,四川,广汉,618307;中国民航飞行学院航空工程学院,四川,广汉,618307;中国民航飞行学院航空工程学院,四川,广汉,618307 |
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| 基金项目： | 国家自然科学基金项目(60572007);;中国民航局科技基金资助项目(MHRD0712) |
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| 摘 要： | 建立了热释电钽酸锂薄膜红外探测器理论模型,用五层薄膜系统模拟了探测器结构,用钽酸锂晶体参数,模拟了探测器结构参数与探测率等性能指标之间的关系,研究了硅衬底厚度和钽酸锂薄膜厚度对探测器性能的影响。模拟结果显示,硅衬底彻底腐蚀形成悬空结构是减小探测器热传导损耗的最有效途径;热释电钽酸锂膜层越薄,器件探测率越高。探测器电压响应同时取决于钽酸锂膜层厚度和探测器外接电路参数。使探测器整体性能最佳的钽酸锂膜层厚度为1～2μm。
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| 关 键 词： | 探测率 红外探测器 钽酸锂薄膜 理论模拟 |
Simulation Study on Detecting Property of Lithium Tantalate Thin Film Infrared Detector |
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| LUO Wentian,ZHANG Deyin,PENG Weidong,ZHANG Xi.Simulation Study on Detecting Property of Lithium Tantalate Thin Film Infrared Detector[J].Semiconductor Optoelectronics,2010,31(1):60-63. |
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| Authors: | LUO Wentian ZHANG Deyin PENG Weidong ZHANG Xi |
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| Affiliation: | Aviation Engineeing College;Civil Aviation Flight University of China;Guanghan 618307;CHN |
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| Abstract: | The theory models of the pyroelectric lithium tantalate thin film infrared detector were established by using the five layer film system to simulate the structure of the detector and using the parameters of lithium tantalate crystal to research the relation between the structural parameters and the detectivity performance.The simulated results show that the best effective method for reducing the loss of thermal conductivity is to form a suspended structure by etching off silicon substrate,and the thinner th... |
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| Keywords: | detectivity infrared detector lithium tantalate film theoretical simulation |
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