| 激光干涉仪的信号处理系统——激光干涉仪技术综述之三 |
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| 引用本文： | 羡一民. 激光干涉仪的信号处理系统——激光干涉仪技术综述之三[J]. 工具技术, 2014, 48(12): 80-84 |
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| 作者姓名： | 羡一民 |
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| 作者单位： | 成都工具研究所有限公司 |
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| 摘 要： | 介绍了激光干涉仪的信号处理方法,分析了单频激光干涉仪中消除直流漂移的方法,双频激光干涉仪中的减法器、频率解调、相位解调技术的特点。
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| 关 键 词： | 激光干涉仪 鉴频器 鉴相器 细分技术 减法器 |
Laser Interferometer Signal Processing System |
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| Xian Yimin. Laser Interferometer Signal Processing System[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2014, 48(12): 80-84 |
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| Authors: | Xian Yimin |
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| Abstract: | The signal processing technology of laser interferometer is introduced and reviewed. In the single- frequency laser interferometer,the DC drift removing technique is analyzed in detail. In the dual- frequency laser interferometer,the signal processing techniques such as subtractor,frequency demodulation,and phase demodulation are also reviewed. |
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| Keywords: | lase interferometer frequency discriminator phase discriminator subdivision technology subtractor |
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