| 基于微位移定位系统MEMS梳齿位移传感器的研究 |
| |
| 引用本文： | 雷焱焱,谷阳钦. 基于微位移定位系统MEMS梳齿位移传感器的研究[J]. 传感器世界, 2012, 18(9): 7-10 |
| |
| 作者姓名： | 雷焱焱 谷阳钦 |
| |
| 作者单位： | 苏州大学机电工程学院 江苏苏州215021 |
| |
| 摘 要： | MEMS硫齿位移传感器是一种基于MEMS技术电容理论的传感器,具有体积小、重量轻、性能稳定、功耗低和易于集成等特点.首先探讨了梳齿传感器的工作原理,随后介绍了使用梳齿传感器有效检测微动工作台位移的方法,并进行了结构失效和梳齿电极不平行失效的可靠性分析.通过采用这种传感器可以达到提高微位移定位平台系统的集成度、精度、分辨...
|
| 关 键 词： | MEMS 梳齿传感器 定位平台系统 微位移 |
Research on MEMS comb displacement sensors based on micro-displacement positioning systems |
| |
| LEI Yan-yan , GU Yang-qing. Research on MEMS comb displacement sensors based on micro-displacement positioning systems[J]. Sensor World, 2012, 18(9): 7-10 |
| |
| Authors: | LEI Yan-yan GU Yang-qing |
| |
| Affiliation: | g (School of Mechanical and Electronic Engineering, Suzhou University, Suzhou 215021, China) |
| |
| Abstract: | Based on MEMS technology and capacitance theory, MEMS comb displacement sensors have the features of small size, light weight, stable performance, low power consumption , ease of integration and so on. Firstly, the working principle of MEMS comb displacement sensors is discussed. And then the effective methods for detecting the displacements of micro platforms using comb sensors are introduced. Finally, reliability analysis of structural failure and the unparallel-comb-electrode failure are discussed. By means of this kind of sensor, the purposes of increasing integration, accuracy, resolution of micro-positioning platforms and decreasing the volume of platform systems can be achieved. |
| |
| Keywords: | MEMS comb sensor positioning platformsystem micro-displacement |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
