High-accuracy displacement metrology and control using a dual Fabry-Perot cavity with an optical frequency comb generator |
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Authors: | Youichi Bitou |
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Affiliation: | 1. Mechanical and Systems Research Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan;2. Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, No. 151, Ying-chuan Road, Tamsui District, New Taipei City, Taiwan |
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Abstract: | A displacement metrology and control system using an optical frequency comb generator and a dual Fabry-Perot cavity is developed with sub-nm accuracy. The optical frequency comb generator has expanded the displacement measurement range and the dual cavity system has suppressed the environmental fluctuation. We evaluated the absolute uncertainty of the developed displacement measurement system to be approximately 190 pm for the displacement of 14 μm and the accurate displacement control using a phase-locked loop was demonstrated with a resolution of approximately 24 pm. |
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