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Integration Concepts for the Fabrication of LTCC Structures
Authors:Amanda Baker  Michael Lanagan  Clive Randall  Elena Semouchkina  George Semouchkin  Khalid Z Rajab  Richard Eitel  Khalid Z Rajab  Raj Mittra  Sorah Rhee  Peter Geggier  Claus Duschl  Günter Fuhr
Affiliation:Center for Dielectric Studies, Materials Research Institute, The Pennsylvania State University, University Park, PA 16802; Department of Electrical Engineering, The Pennsylvania State University, University Park, PA 16802; Fraunhofer IBMT Technology Center Hialeah, Hialeah, FL 33010; Fraunhofer Institute for Biomedical Engineering IBMT, St. Ingbert, Germany
Abstract:At the Keck Smart Materials Integration Laboratory at Penn State University, low-temperature co-fired ceramic (LTCC) material systems have been used to fabricate a number of devices for a variety of applications. This article presents an overview of the integration of the concepts and materials that we have used to achieve miniaturization and unique device function. Examples of microwave filters, metamaterial antennas, and a dielectrophoretic cell sorter will be presented, with emphasis on device modeling and design, prototype construction methods, and test results.
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