Flexible thin-film transistors using multistep UV nanoimprint lithography |
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Authors: | Pieter F Moonen Boris Vratzov Wiljan TT Smaal BK Charlotte Kjellander Gerwin H Gelinck Erwin R Meinders Jurriaan Huskens |
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Affiliation: | 1. Molecular Nanofabrication Group, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands;2. NT&D – Nanotechnology and Devices, Wirichsbongardstr. 24, 52062 Aachen, Germany;3. Holst Centre/TNO, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands |
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Abstract: | A multistep imprinting process is presented for the fabrication of a bottom-contact, bottom-gate thin-film transistor (TFT) on poly(ethylene naphthalate) (PEN) foil by patterning all layers of the metal–insulator–metal stack by UV nanoimprint lithography (UV NIL). The flexible TFTs were fabricated on a planarization layer, patterned in a novel way by UV NIL, on a foil reversibly glued to a Si carrier. This planarization step enhances the dimensional stability and flatness of the foil and thus results in a thinner and more homogeneous residual layer. The fabricated TFTs have been electrically characterized as demonstrators of the here developed fully UV NIL-based patterning process on PEN foil, and compared to TFTs made on Si with the same process. TFTs with channel lengths from 5 μm down to 250 nm have been fabricated on Si and PEN foil, showing channel length-dependent charge carrier mobilities, μ, in the range of 0.06–0.92 cm2 V−1 s−1 on Si and of 0.16–0.56 cm2 V−1 s−1 on PEN foil. |
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Keywords: | UV nanoimprint lithography Organic electronics Flexible thin-film transistor Submicron channel lengths Step-and-repeat planarization |
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