用于XeF蓝绿激光器的表面放电光泵浦源

基于Al2O3陶瓷、BN陶瓷和聚四氟乙烯三种基底建立了分段表面放电光泵浦源,对比研究了这三种表面放电光泵浦源的电学特性、辐射特性和烧蚀特性。利用放电波形计算了表面放电光泵浦源的等效电感、等效电阻和沉积效率,应用光谱法比较了它们的紫外辐射强度,并采用平均线烧蚀率评估了三种泵浦源的耐烧蚀性能。通过比较研究发现,在充电电压为13.5~26.8kV、间隙长度为8cm、放电室内混合气体气压为100kPa条件下,三种泵浦源中Al2O3陶瓷表面放电光泵浦源的沉积效率最高,大于82%;辐射光谱具有紫外增强效应,紫外辐射最强;平均线烧蚀率最小(小于0.15μm/shot),耐烧蚀性能最好。研究结果表明采用Al2O3陶瓷表面放电光泵浦源作为大功率重频XeF蓝绿激光器的泵浦源,可提高XeF蓝绿激光器的寿命。

Surface discharge optical pumping source for XeF blue-green laser

The surface discharge optical pumping source is a key unit of high power XeF blue-green laser with pulse repetition mode. To increase the lifetime of the high power XeF blue-green laser, it is very important to develop a kind of surface discharge optical pumping source which emit strong UV radiation with a long lifespan. In this paper, three kinds of sectioned surface discharge optical pumping sources, which are made from Al2O3 ceramic substrate, BN ceramic substrate and Teflon substrate, are developed respectively, and the electrical, radiation and ablation characteristics of them are examined. Based on discharge current waveform, the equivalent inductance, resistance and energy deposition efficiency of these sources are calculated. UV radiation intensities of the sources are compared by their discharge emission spectrum. Anti-ablative performances of the material are estimated by average line ablation rate which is calculated after 1000 shots. By comparing experimental results from three kinds of surface discharge optical pumping sources, it is found that the best energy deposition efficiency, which is above 82%, is obtained from surface discharge optical pumping source with Al2O3 ceramic substrate, and the UV radiation enhancement is observed in its radiation spectra, with an average line ablation rate less than 0.15 m/shot. The normal working condition is as follows: the charge voltage ranges from 13.5 kV to 26.8 kV, the discharge gap length is 8 cm, and 60%Ar-40% N2 mix gas pressure is 100 kPa. It is believed that Al2O3 ceramic substrate may be utilized to obtain long lifetime XeF blue-green laser.