瑞奇-康芒式大口径平面镜面形数据处理方法对比研究

为使瑞奇-康芒法检测结果更为真实地反映出被检平面镜的面形情况，对瑞奇-康芒检测数据处理方法进行研究。针对现有的数据模型，提出利用坐标转换关系法计算平面镜的面形误差。利用仿真验证坐标转换法的有效性并分析此方法的理论计算精度。通过对比实验结果与干涉仪直接检测结果可知，坐标转换法的实际PV检测精度优于1/20 ，RMS检测精度优于1/100 ，达到高精度检测要求。相比影响矩阵法结果，PV精度提高了0.013 ，RMS精度提高了0.003 7 ，证明坐标转换法更适用于瑞奇-康芒法数据处理分析。

Comparative study on data processing method for large flat mirror in Ritchey-Common test

In order to acquire a more exact surface figure error result,the method about solving the Ritchey-Common test data was studied. Based on the existing mathematical model, a method which utilized the relationship between the system pupil coordinate and test flat mirror surface coordinate to recover the surface error condition was introduced. The effectiveness of this method was verified by simulation, the theoretical accuracy of this method was also analyzed. Comparing the test result with the result measured by interferometer directly, we can know the actual test accuracy of coordinates transforming method: the peak-valley(PV)value is better than 1/20 ,the root-mean-square (RMS) value is better than 1/100 , which can satisfy the high requirement of test. Even comparing to result of impact matrix method, the accuracy of PV and RMS can improve 0.013 ,0.0037 respectively .This indicates that the coordinate transforming method is more suitable for Ritchey-Common test.