| 类金刚石膜的制备、性能和应用 |
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| 引用本文： | 袁镇海,邓其森,罗广南,谢致薇,郑健红.类金刚石膜的制备、性能和应用[J].材料科学与工程学报,1994(4). |
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| 作者姓名： | 袁镇海 邓其森 罗广南 谢致薇 郑健红 |
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| 作者单位： | 广州有色金属研究院 |
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| 摘 要： | 本文简单介绍了类金刚石膜的制备方法、并讨论了膜成分、结构、电阻率、硬度、内应力和附着力等性能，总结了类金刚石膜在机械、电子、声学、电子计算机、光学和医学等领域的应用状况以及将来的发展趋势。
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| 关 键 词： | 类金刚石膜，性能，应用 |
Preparation, Properties and Applications of Diamond-Like Carbon Films |
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| Yuan Zhenhai,Deng Qisen, Luo Guangnan, Xie Zhiwei, Zheng Jianhong.Preparation, Properties and Applications of Diamond-Like Carbon Films[J].Journal of Materials Science and Engineering,1994(4). |
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| Authors: | Yuan Zhenhai Deng Qisen Luo Guangnan Xie Zhiwei Zheng Jianhong |
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| Affiliation: | Guangzhou Research Institute of Nonferrors Metals |
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| Abstract: | The deposition methods of Diamond-Like Carbon films are briefly introduced in this paper.The properties of the films such as chemical composition,structure, specific resistance, hardness, internal stress and adhesion, are also discussed here. Finally, the applications of the films in the fields of machinery,electronics, acoustics, computer, optics and medicine, etc., are summarized. |
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| Keywords: | Diamond-Like Carbon films properties applications |
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