| 基于扫描探针显微镜的纳米加工技术研究进展 |
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| 引用本文： | 何光宏,杨学恒.基于扫描探针显微镜的纳米加工技术研究进展[J].微电子学,2005,35(2):169-173. |
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| 作者姓名： | 何光宏 杨学恒 |
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| 作者单位： | 重庆大学,数理学院,重庆,400044 |
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| 摘 要： | 扫描探针显微镜(SPM)纳米加工技术是当前非常活跃的纳米加工研究领域，其研究成果有可能成为微纳米器件制作的主要方法。文章主要介绍了单原子操纵、阳极氧化法，以及机械刻蚀加工等SPM纳米加工方法的机理、特点及研究进展，提出了今后需要重视的研究方向。
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| 关 键 词： | 扫描探针显微镜 纳米加工 单原子操纵 阳极氧化法 机械刻蚀 |
| 文章编号： | 1004-3365(2005)02-0169-05 |
Advancement of Nanofabrication Technologies Based on Scanning Probe Microscope |
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| HE Guang-hong,YANG Xue-heng.Advancement of Nanofabrication Technologies Based on Scanning Probe Microscope[J].Microelectronics,2005,35(2):169-173. |
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| Authors: | HE Guang-hong YANG Xue-heng |
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| Abstract: | Nanofabrication technology based on scanning probe microscope (SPM) is an active research subject in the nanofabrication field, which has the potential to become the major technique for nanofabrication of micro/nano devices. Mechanisms of SPM-based nano-technologies, such as single atom manipulation, anode oxidation and mechanical nanofabrication, are described, and the advancement of research works in this subject is discussed. Finally, research directions to be addressed at present are proposed. |
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| Keywords: | Scanning probe microscope Nanofabrication Single atom manipulation Anode oxidation Mechanical nanofabrication |
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