电容式加速度传感器结构的计算机仿真

针对硅梁论述了微机械电容式加速度传感器的工作原理,应用有限元分析方法对三种不同的硅梁结构对加速度计进行结构建模,并模拟分析了三种不同的梁的加速度计结构的第一和第二模态,1g加速度下的挠度,以及存在预应力情况下结构的第一、第二模态响应频率,得到了最优的双梁结构,并在试验中得到验证,最终研制出了高水平的电容式加速度传感器。

Structural simulation and optimize of capacitive accelerometer

The principle of capacitive accelerometer with silicon beam is discussed in this paper.The finite element method(FEM)was applied to build three models with different silicon beam structures.Additionally,the first and second modal analysis with and without pre-stress,individual deflection caused by gravity of the three different beam structures were calculated out.Finally,we get the conclusion that double-beam structure is better than the other two different structures.The optimized parameters are benefited for the preparation of accelerometers and a better performance has got as the results.