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Distributed feedback quantum cascade lasers operating in continuous-wave mode at λ≈7.6μm
引用本文:张锦川,王利军,刘万峰,刘峰奇,赵立华,翟慎强,刘俊岐,王占国.Distributed feedback quantum cascade lasers operating in continuous-wave mode at λ≈7.6μm[J].半导体学报,2012,33(2):51-53.
作者姓名:张锦川  王利军  刘万峰  刘峰奇  赵立华  翟慎强  刘俊岐  王占国
作者单位:Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences;Department of Electronic Engineering,Tsinghua University
基金项目:the National Science Fund for Distinguished Young Scholars of China,the National Natural Science Foundation of China,the National High Technology Research and Development Program of China
摘    要:正Distributed feedback(DFB) quantum cascade lasers(QCLs) in continuous-wave(CW) mode emitting atλ≈7.6μm are presented.Holographic lithography was used to fabricate the first-order distributed feedback grating. For a high-reflectivity-coated QCL with 14.5-μm-wide and 3-mm-long cavity,CW output powers of 300 mW at 85 K and still 10 mW at 270 K are obtained.Single-mode emission with a side-mode suppression ratio(SMSR) of about 30 dB and a wide tuning range of ~300 nm in the temperature range from 85 to 280 K is observed.

关 键 词:quantum  cascade  laser  distributed  feedback  holographic  lithography
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