| 影响大电流热阴极辉光放电稳定工作的因素 |
| |
| 引用本文： | 白亦真,吕宪义,金曾孙,姜志刚.影响大电流热阴极辉光放电稳定工作的因素[J].吉林大学学报(理学版),2006,44(1):89-92. |
| |
| 作者姓名： | 白亦真 吕宪义 金曾孙 姜志刚 |
| |
| 作者单位： | 大连理工大学,物理系,辽宁省,大连,116023;吉林大学,超硬材料国家重点实验室,长春,130012 |
| |
| 摘 要： | 大电流热阴极辉光放电用于等离子体化学气相沉积金刚石膜, 有效地提高了沉积速率和膜品质. 大电流辉光放电具有较强的向弧光放电转化趋势, 本文研究了影响大电流热阴极辉光放电稳定工作的因素, 结果表明, 阴极温度、 表面形貌、 阴阳极位置和尺寸配置关系等对辉光放电的稳定性均有不同程度的影响.
|
| 关 键 词： | 热阴极 辉光放电 稳定性 |
| 文章编号： | 1671-5489(2006)01-0089-04 |
| 收稿时间： | 2005-03-22 |
| 修稿时间： | 2005年3月22日 |
Factors Affecting the Stability of Large Current Hot Cathode Glow Discharge |
| |
| BAI Yi-zhen,L Xian-yi,JIN Zeng-sun,JIANG Zhi-gang.Factors Affecting the Stability of Large Current Hot Cathode Glow Discharge[J].Journal of Jilin University: Sci Ed,2006,44(1):89-92. |
| |
| Authors: | BAI Yi-zhen L Xian-yi JIN Zeng-sun JIANG Zhi-gang |
| |
| Affiliation: | 1. Department of Physics, Dalian University of Technology, Dalian 116023, Liaoning Province, China; 2. State Key Laboratory of Superhard Materials, Jilin University, Changchun 130012, China |
| |
| Abstract: | Large current hot cathode glow discharge was used for plasma chemical vapor deposition of diamond films.It improved deposition rate and films quality efficiently.Large current glow discharge has a strong tendency to transform to arc discharge. This paper focuses our attention on the(factors) affecting the stability of large current hot cathode glow discharge.The research results show that the cathode temperature,the cathode(surface) state and the size and place disposition between cathode and anode have influences on the stability of glow discharge,respectively. |
| |
| Keywords: | hot cathode glow discharge stability |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《吉林大学学报(理学版)》浏览原始摘要信息 |
|
点击此处可从《吉林大学学报(理学版)》下载全文 |
|
