物理气相沉积硬质耐腐蚀磨损防护涂层研究进展

叙述了用物理气相沉积技术制备的硬质耐腐蚀磨损防护涂层的研究进展。重点介绍了腐蚀磨损耦合工况特性和作用机理，单元、多元掺杂氮化物涂层，高熵氮化物涂层，多层、纳米多层、纳米复合、梯度氮化物涂层耐腐蚀磨损性能研究，非金属元素/金属元素掺杂DLC涂层、多层复合DLC涂层耐腐蚀磨损性能研究，并对涂层改性、强化机理和腐蚀磨损失效机制进行了总结。最后，提出了未来物理气相沉积硬质耐腐蚀磨损防护涂层重点发展的方向，应重点发展涂层组元/结构设计、力–电耦合损伤机理研究、高效率研发设计、涂层先进制备装备与评估体系等方面的能力。

Hard Corrosion-Wear Resistant Protection Coatings Deposited by Physical Vapor Phase

The paper aims to review the research progress of hard corrosion-wear resistant protection coatings prepared by physical vapor deposition technology. The characteristics and mechanism of corrosion-wear coupling conditions are mainly introduced. The corrosion-wear resistance research of unit/multi-doped nitride coating, high-entropy nitride coating, multilayer/nano-multilayer/nanocomposite/gradient nitride coating, non-metallic/metal-doped DLC coating, and multilayer composite DLC coating are introduced. The coating modification, strengthening mechanism, and corrosion-wear failure mechanism are summarized. Finally, the development direction of the hard corrosion-wear resistant protection coatings for physical vapor deposition is proposed, and different capabilities of coating component/structure design, force-electrical coupling damage mechanism research, high-efficiency R&D design, advanced coating equipment, and evaluation system should be focused on.