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集成化柔性激光加工系统的误差检测及其补偿
引用本文:刘荷辉,虞钢.集成化柔性激光加工系统的误差检测及其补偿[J].中国机械工程,2003,14(5):367-370.
作者姓名:刘荷辉  虞钢
作者单位:中国科学院力学研究所技术发展部,北京市,100080
基金项目:中国科学院大型仪器设备研制项目 (中科院计字[1997]第 167号 ),2 0 0 0~ 2 0 0 3年中国科学院知识创新工程重大项目 ( KGCX— 11
摘    要:基于集成化柔性激光加工系统的特殊框架结构和为满足测量及加工精度要求,针对加工系统的整个框架和机器人腕部分别建立了相应的误差补偿几何模型。利用三维激光跟踪干涉仪对激光加工系统进行了检测,并根据检测结果结合相对应的补偿模型对系统进行了实时软件误差补偿。测量和加工试验及干涉仪的检测结果显示所建误差补偿模型合理,系统满足测量和激光加工的精度要求。

关 键 词:误差检测  激光跟踪干涉仪  柔性激光加工  误差补偿  CIMS
文章编号:1004-132X(2003)05-0367-04

Error Examination and Compensation of a Computer Integrated Flexible Laser Processing System
Liu Hehui.Error Examination and Compensation of a Computer Integrated Flexible Laser Processing System[J].China Mechanical Engineering,2003,14(5):367-370.
Authors:Liu Hehui
Abstract:According to the structure and the precision requirements of a computer integrated flexible laser processing system, error compensation models have been developed for structure of the laser processing system and wrist of the robot. Tests and examinations of the system have been carried out based on the principle of a laser interference tracker system, and according to the results of the tests and examinations, real-time software error compensation has been made. The measuring and manufacturing experiments and examinations by the 3D laser interference tracker prove that the models are reasonable and suitable, and the precision of the laser processing system satisfies the measuring and processing requirements.
Keywords:laser tracker system    flexible laser machining    error analysis and compensation    CIMS
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