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Structural properties of a-SiO_x:H films studied by an improved infrared-transmission analysis method |
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| Authors: | Wang Shuo Zhang Xiao-Dan Xiong Shao-Zhen Zhao Ying |
| Abstract: | amorphous silicon oxide film, thin thickness, infrared transmission, structural properties |
| Keywords: | amorphous silicon oxide film thin thickness infrared transmission structural properties |
| 本文献已被 CNKI 维普 等数据库收录！ | |
