In situ RHEED monitor of the growth of epitaxial anatase TiO2 thin films |
| |
| Affiliation: | 1. Division of Cardiology, Department of Medicine, Faculty of Medicine, Kindai University, Osaka 589-8511, Japan;2. Department of Cardiovascular Dynamics, National Cerebral and Cardiovascular Center, Osaka 565-8565, Japan;3. Department of Research Promotion, National Cerebral and Cardiovascular Center, Osaka 565-8565, Japan;4. Department of Rehabilitation Medicine, Kindai University, Osaka 589-8511, Japan;1. Department of Mathematics and Geosciences, University of Trieste, Trieste, Italy;2. Istituto Nazionale di Oceanografia e di Geofisica Sperimentale (OGS), Trieste, Italy;3. Department of Physics and Geology, University of Perugia, Perugia, Italy;4. Laboratório National de Energia e Geologia (LNEG), Amadora, Portugal;5. Instituto Dom Luiz, Faculdade de Ciências, Universidade de Lisboa, Lisboa, Portugal;6. Department of Geosciences, University of Padova, and IGG-CNR, Padua, Italy;7. Department of Geology, Faculty of Sciences-Semlalia, Cadi Ayyad University, Marrakech, Morocco |
| |
| Abstract: | Epitaxial anatase TiO2 thin films were successfully grown on (0 0 1) SrTiO3 substrates by the laser molecular-beam epitaxy (laser-MBE) method. The whole growth process is monitored by in situ reflection high-energy electron diffraction (RHEED). RHEED monitoring shows a transition from a streaky pattern to a spot pattern during deposition, indicating different growth modes of TiO2 film. The RHEED patterns are in consistent with the RHEED intensity oscillation results. The atomic force microscopy (AFM) and X-ray diffraction (XRD) investigation show that the thin films have single crystalline orientation with roughness less than three unit cells. |
| |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ |
|
