| 双声路声表面波毒剂传感器的设计 |
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| 引用本文： | 陈传治,马晋毅,左伯莉,江洪敏. 双声路声表面波毒剂传感器的设计[J]. 传感器与微系统, 2009, 28(4): 91-93 |
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| 作者姓名： | 陈传治 马晋毅 左伯莉 江洪敏 |
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| 作者单位： | 1. 防化指挥工程学院,北京,102205
2. 中国电子科技集团公司第二十六所,重庆,400060 |
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| 摘 要： | 对声表面波（SAW）芯片结构类型、参数条件、覆膜方法及制作工艺流程进行了详细研究，设计了一种新型双声路谐振器型SAW毒剂传感器，并以聚表氯醇PECH为敏感膜材料，测试了该传感器对芥子气（HD）的检测性能，结果表明：该传感器具有稳定性好、灵敏度高、响应快速、适于连续实时检测等特点，为发展毒剂检测器材提供了依据。
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| 关 键 词： | 声表面波谐振器 双声路 毒剂 气体传感器 |
Design of dual-path SAW sensors for chemical warfare agents |
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| CHEN Chuan-zhi,MA Jin-yi,ZUO Bo-li,JIANG Hong-min. Design of dual-path SAW sensors for chemical warfare agents[J]. Transducer and Microsystem Technology, 2009, 28(4): 91-93 |
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| Authors: | CHEN Chuan-zhi MA Jin-yi ZUO Bo-li JIANG Hong-min |
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| Affiliation: | CHEN Chuan-zhi, MA Jin-yi, ZUO Bo-li, JIANG Hong-min ( 1. Institute of Chemical Defense, Beijing 102205, China; 2. The 26th Research Institute, China Electronics Technology Group Corporation, Chongqing 400060, China) |
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| Abstract: | The SAW configuration type,interdigital transducers configuration, fabrication technology and process, as well as the sensitive material and coating methods, are studied in detail. Using poly epichlorehydrin（PECH） as the sensitive coating for mustard gas（HD） , a novel dual-path SAW resonator gas sensor is designed and tested. The results show that such sensor has merits of good stability, high sensitivity, fast response, suitability for the continunous and real time detection ,which is an ideal gas sensor for chemical warfare agents detection. |
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| Keywords: | surface acoustic wave （SAW）resonator dual-path chemical warfare agents gas sensor |
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