| 透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线半峰宽研究 |
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| 引用本文： | 李晓峰,张景文,高鸿楷,侯洵. 透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线半峰宽研究[J]. 光子学报, 2002, 31(1): 93-97 |
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| 作者姓名： | 李晓峰 张景文 高鸿楷 侯洵 |
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| 作者单位： | 中国科学院西安光学精密机械研究所光电子学研究室,西安710068 |
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| 摘 要： | 本文研究了晶体X射线摇摆曲线半峰宽同其晶格完整性之间的关系,外延层之间X射线衍射的非相干叠加以及热应力引起的晶格应变和晶面弯曲对摇摆曲线半峰宽宽窄的影响.
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| 关 键 词： | AlGaAs/GaAs X射线衍射 应力 应变 光电阴极 |
| 收稿时间： | 2001-07-05 |
| 修稿时间： | 2001-07-05 |
X-RAY DIFFRACTION ROCKING CURVE OF AlGaAs/GaAs EPITXIAL LAYER OF TRANSPARENT GaAs PHOTOCATHODE |
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| Li Xiaofeng,Zhang Jingwen,Gao Hongkai,Hou Xun. X-RAY DIFFRACTION ROCKING CURVE OF AlGaAs/GaAs EPITXIAL LAYER OF TRANSPARENT GaAs PHOTOCATHODE[J]. Acta Photonica Sinica, 2002, 31(1): 93-97 |
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| Authors: | Li Xiaofeng Zhang Jingwen Gao Hongkai Hou Xun |
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| Affiliation: | Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710068 |
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| Abstract: | The paper researched the relationship between the FWHM of X-ray diffraction rocking curve and lattice perfection,elaborated the influence on the FWHM of rocking curve due to non-inference interaction of diffraction beam and lattice strain,lattice plane bend. |
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| Keywords: | AlGaAs/GaAs X-ray diffraction Stress/strain Photocathode |
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