金刚石膜及类金刚石膜的光学应用研究进展

金刚石膜及类金刚石(DLC)膜由于具有宽光谱透过率高、硬度高、摩擦系数小、化学稳定性好等优点,可以作为多种光学材料如硅、锗、玻璃、硫化锌、MgF2,HgCdTe,KCl等的增透/保护膜,起到抗磨损、抗腐蚀、抗潮解和抗氧化的作用.金刚石膜及类金刚石膜已被应用于太阳能硅电池、高功率CO2激光器窗口、潜望镜红外(IR)窗口、飞机前视红外窗口、导弹头罩窗口和宇航探测器等.总结了这一方面的应用和研究进展,展示了金刚石膜及类金刚石膜巨大的优越性与广阔的应用前景.

Research Progress of Optical Application of Diamond Carbon Films and Diamond-Like Carbon Films

Because of their inherent merits of high optical transparency in wide infrared (IR) region， high hardness， low friction coefficient， chemical stability and so on， diamond carbon films and diamond-like carbon(DLC) films can be used as anti-reflection and protective films on varies optical materials including Si， Ge， Glass， ZnS， MgF2， HgCdTe， KCl and so on. With the two films， those problems of optical material's wear， corrosion， deliquescence and oxygenation are solved. The two films are applied on silicon solar cell， window of high power CO2 laser， IR window of periscope， IR front window of aeroplane， missile dome， aero-space detector and so on. Research and application progress are summaried， and their huge advantages and fine application prospect are expounded.