| GaN薄膜制备及脉冲激光沉积法的研究进展 |
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| 引用本文： | 童杏林,罗梦泽,姜德生,刘忠明.GaN薄膜制备及脉冲激光沉积法的研究进展[J].四川激光,2006,27(1):5-7. |
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| 作者姓名： | 童杏林 罗梦泽 姜德生 刘忠明 |
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| 作者单位： | 武汉理工大学光纤传感技术与信息处理教育部重点实验室,武汉430070 |
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| 摘 要： | 介绍了国内外制备GaN材料的历史和现状。分析了GaN材料及其薄膜的各种制备工艺的特点，并详细介绍了采用激光沉积工艺制备GaN薄膜的研究进展。
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| 关 键 词： | GaN薄膜 激光沉积 |
| 文章编号： | 0253-2743（2006）01-0005-03 |
| 收稿时间： | 2004-04-05 |
| 修稿时间： | 2004年4月5日 |
Research development on GaN films grown by laser deposition |
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| TONG Xing-lin,LUO Meng-ze,JIANG De-sheng,LIU Zhong-ming.Research development on GaN films grown by laser deposition[J].Laser Journal,2006,27(1):5-7. |
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| Authors: | TONG Xing-lin LUO Meng-ze JIANG De-sheng LIU Zhong-ming |
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| Affiliation: | Key Laboratory of Fiber Optic Sensing Technology and Information Processing Wuhan University of Technology, Ministry of Education, Wuhan 430070, China |
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| Abstract: | In this paper, a comprehensive review for research history and current status of GaN material preparation as well as various processing characteristics is presented. The analyses of the characteristics of various deposition techniques are carried out, and the research development on the preparation of GaN thin films by laser deposition is introduced. |
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| Keywords: | GaN thin films laser deposition development |
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