用短相干光源测量平行平板玻璃的光学均匀性

为了解决传统干涉绝对测量法不能测量前后表面平行度很好的光学玻璃和晶体均匀性问题，提出了在以短相干光为光源的泰曼-格林干涉仪上，通过调整参考光路的光程，使被测样品的前后表面分别处在零光程差位置，这样从样品两面反射回来的光就不会同时满足和参考光相干涉的条件，从而解决了前后面的反射光干涉混叠问题.用虚光栅移相莫尔条纹法处理采集到的干涉图，得到位相数据，代入绝对测量法的计算公式，得出待测样品的折射率分布.对厚度为13 mm、口径为75 mm的光学平板玻璃进行测量.结果表明，光学均匀性检测准确度可达到2.6×10－6，被测样品折射率偏差的峰谷值为Δnpv=6.06×10－6，均方根值为Δnrms=8.96×10－7.

Measurement of Homogeneity of Optical Glass with Parallel Surfaces Using Low Coherence Light Sources

In order to solve the problem that the traditional interferometric absolute method can not test the homogeneity of optical glass and crystal with parallel surfaces,a low coherence light source was used on the Twyman-Green interferometer.Both the front and the rear surface of the tested sample were placed close to the zero-OPD position by adjusting the optical path of the reference arm.The lights reflected from the two surfaces were not interfering with the reference light simultaneously.So the lights reflec...