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Influence of Radio-Frequecy Power on Structural and Electrical Properties of Sputtered Hafnium Dioxide Thin Films |
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| Authors: | LIU Wen-Ting LIU Zheng-Tang TAN Ting-Ting YAN Feng |
| Affiliation: | School of Materials Science and Engineering, Northwestern Polytechnical University, Xi＇an 710072 |
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