| 不同过渡层对钢基金刚石薄膜的影响 |
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| 引用本文： | 王 玲,余志明,魏秋平,田孟昆,王志辉.不同过渡层对钢基金刚石薄膜的影响[J].中国表面工程,2011,24(1):33-39. |
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| 作者姓名： | 王 玲 余志明 魏秋平 田孟昆 王志辉 |
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| 作者单位： | 中南大学,材料科学与工程学院,长沙,410083 |
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| 基金项目： | 粉末冶金国家重点实验室开放基金(2008112048); 湖南省研究生创新基金(1343–74236000005); 中南大学贵重仪器开放共享基金(ZKJ2008001) |
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| 摘 要： | 采用超高真空热丝化学气相沉积(HFCVD)系统,以甲烷和氢气为反应气体,在高速钢W18Cr4V基体上利用3种不同的过渡层(WC、Cr、WC/Cr)制备金刚石薄膜。采用场发射扫描电子显微镜(FE–SEM)、X射线衍射仪(XRD)、显微激光拉曼光谱仪(Raman)以及洛氏硬度计对过渡层和金刚石薄膜进行检测分析,研究了不同过渡层对金刚石薄膜形貌质量和附着性能的影响。结果表明,3种过渡层均可以有效减少钢基中Fe对金刚石薄膜的负面影响,提高金刚石的形核率;其中,采用WC/Cr过渡层时膜基间残余应力最小,仅为0.25 Gpa,附着性能最好。
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| 关 键 词： | 金刚石薄膜 高速钢 过渡层 化学气相沉积 附着性能 |
Investigation of Diamond Films Deposition on Steel Substrates with Different Interlayers |
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| WANG Ling,YU Zhing-ming,WEI Qiu-ping,TIAN Meng-kun,WANG Zhi-hui.Investigation of Diamond Films Deposition on Steel Substrates with Different Interlayers[J].China Surface Engineering,2011,24(1):33-39. |
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| Authors: | WANG Ling YU Zhing-ming WEI Qiu-ping TIAN Meng-kun WANG Zhi-hui |
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| Affiliation: | WANG Ling,YU Zhing-ming,WEI Qiu-ping,TIAN Meng-kun,WANG Zhi-hui(School of Materials Science and Engineering,Central South University,Changsha 410083) |
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| Abstract: | Diamond films were deposited on high-speed steel(HSS) substrates pre-coated with different interlayers(WC,Cr and WC/Cr)by hot filament chemical vapour deposition(HFCVD).The surface morphology,film quality and interface structure of the diamond films were characterised by scanning electron microscopy(SEM),micro-raman spectroscopy and X-ray diffractometry(XRD),respectively.The adhesion of the diamond films was measured by Rockwell hardness tester.The results show that with the WC,Cr and WC/Cr interlayer,the h... |
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| Keywords: | diamond films high-speed steel substrates interlayers chemical vapour deposition adhesion |
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