| 磁性复合磨粒化学机械抛光技术及其加工试验研究 |
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| 引用本文： | 许雪峰,郭权,黄亦申,胡建德,彭伟. 磁性复合磨粒化学机械抛光技术及其加工试验研究[J]. 机械工程学报, 2011, 47(21). DOI: 10.3901/JME.2011.21.186 |
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| 作者姓名： | 许雪峰 郭权 黄亦申 胡建德 彭伟 |
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| 作者单位： | 1. 浙江工业大学特种装备制造与先进加工技术浙江省重点实验室 杭州310014
2. 浙江工业大学特种装备制造与先进加工技术浙江省重点实验室 杭州310014;浙江万向精工有限公司 杭州311215 |
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| 基金项目： | 浙江省自然科学基金重点资助项目(Z1080625) |
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| 摘 要： | 提出一种新型的磁性复合磨粒化学机械抛光技术。该技术利用磁性聚合物微球与SiO2磨粒组成的复合磨粒抛光液,在辅助磁场的作用下,实现了一种磨粒尺寸与硬质抛光盘微观形貌依赖性小、材料去除率较高的抛光工艺。建立直径8 mm、高度不等的稀土钕铁硼永磁体以点阵形式组合形成的4类辅助磁场。仿真计算表明,柱状下凹磁极的磁场磁力HdH/dz分布均匀,磁性微球受到的磁力一致性好。对磁性微球在抛光系统中的受力分析表明,磁性微球受到的磁力有助于复合磨粒从近抛光区域进入抛光区域,磁性复合磨粒能以二体磨损的方式划擦去除加工表面。以表面粗糙度Ra 0.5μm的硬质抛光盘进行硅片抛光试验,施加辅助磁场前后,硅片的材料去除率从66 nm/min提高到179 nm/min,硅片表面粗糙度由抛光前Ra 405.860 nm减小到Ra 0.490 nm。
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| 关 键 词： | 化学机械抛光 抛光液 磁性复合磨粒 辅助磁场 |
Chemical Mechanical Polishing Using Magnetic Composite Abrasives Slurry and Experimental Study on Polishing Performance |
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| XU Xuefeng,GUO Quan,HUANG Yishen,HU Jiande,PENG Wei. Chemical Mechanical Polishing Using Magnetic Composite Abrasives Slurry and Experimental Study on Polishing Performance[J]. Chinese Journal of Mechanical Engineering, 2011, 47(21). DOI: 10.3901/JME.2011.21.186 |
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| Authors: | XU Xuefeng GUO Quan HUANG Yishen HU Jiande PENG Wei |
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| Affiliation: | XU Xuefeng1 GUO Quan1,2 HUANG Yishen1 HU Jiande1 PENG Wei1(1.Zhejiang Provincial Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology,Zhejiang University of Technology,Hangzhou 310014,2.Zhejiang Wanxiang Precision Industry Co.Ltd.,Hangzhou 311215) |
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| Abstract: | A polishing method that uses an auxiliary magnetic field is proposed,in which magnetic polymer microspheres/SiO2 composite abrasives are anchored on a smooth glass tool plate by the magnetic force,and the dependence between diameter of composite abrasive and morphology of tool plate is reduced.The auxiliary magnetic field is established by NdFeB permanent magnets with 8 mm diameter and different heights.The finite element method(FEM) analysis shows that the magnetic field with a concave-down columnar sectio... |
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| Keywords: | Chemical mechanical polishing Slurry Magnetic composite abrasives Auxiliary magnetic field |
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