电极与介电层褶皱接触对压电式柔性电子皮肤性能的影响

提出了一种基于压电效应制备柔性电子皮肤的简单方法。为了研究纳米改性对柔性电子皮肤各层性能的影响，首先以纳米SiO₂粒子作为改性体，以聚二甲基硅氧烷(PDMS)作为基体，制备出SiO₂/PDMS复合柔性衬底，解决了在PDMS上磁控溅射沉积电极材料产生裂纹的现象，成功获得能够稳定工作的柔性电极。然后用钛酸钡/碳纳米管/聚二甲基硅氧烷(BaTiO₃/CNTs/PDMS)复合材料作为功能层，制备出一种五层结构的高灵敏性柔性电子皮肤，并找到一种通过改变基板粗糙度的简单方法构建电极与介电层的褶皱接触，进而提升柔性电极的电导率与柔性电子皮肤的压电响应信号。 

Effect of folded contact between electrode and dielectric layer on the performance of piezoelectric flexible electronic skin

A simple method for fabricating flexible electronic skin based on piezoelectric effect was presented. In order to study the effect of nano modification on the performance of flexible electronic skin, SiO₂/polydimethylsiloxane (PDMS) composite flexible substrate was prepared by using nano-SiO₂ particles as modifiers and PDMS as matrix. The flexible and stable electrodes were prepared and the crack problem of electrode material on flexible PDMS substrate by magnetron sputtering was successfully solved. The functional layer of barium titanium trioxide/carbon nanotubes/PDMS (BaTiO₃/CNTs/PDMS) was implanted in the five-layer structure of the flexible electronic skin that was designed based on the piezoelectric effect. A simple method by varying the substrate roughness was proposed to make a folded contact between the electrode and the dielectric layer. This method improves the conductivity and piezoelectric response of the prepared flexible electronic skin.