MEMS三维静动态测试系统

采用集成频闪成像、计算机微视觉和显微干涉技术，研制了微机电系统(MEMS)三维静动态测试系统。系统可进行MEMS面内刚体运动、表面形貌、垂向变形和离面运动的测量。对于面内运动测量，提出了基于立方样条插值的亚像素步长相关模板匹配算法，从MEMS视觉图中提取面内位移，匹配精度为0．02pixels。对于离面运动测量，采用Hariharan 5步相移干涉(PSI)算法和去包裹算法，离面运动测量分辨率可达1nm。通过对Si微压力传感器膜和Si微陀螺仪的静动态测试，验证了系统的适用性和可靠性。

Measurement System for 3D Static and Dynamic Characterization of MEMS

A measurement system for 3D static and dynamic characterization of microelectromechanical systems(MEMS),in which stroboscopic imaging,computer microvision and microscopic interferometry were applied,was developed for measuring in-plane-rigid-body motions,surface shapes,out-of-plane motions and deformations of microstructures.A new algorithm of sub-pixel step length correlation template matching based on cubic spline interpolation was proposed to extract the in-plane displacement from vision images with a resolution 0.02 pixel.Hariharan five-step phase-shift interferometry(PSI) algorithm and unwrapping algorithms were adopted to measure out-of-plane motions.The out-of-plane displacement resolution is better than 1 nm.The practicability and reliability of system are illustrated with the study of the static characterizations of a pressure sensor and the dynamic behavior of a microgyroscope.