微型石英音叉陀螺模态特性的有限元分析

MEMS石英音叉陀螺是近年来发展起来的新型惯性器件。在石英音叉的早期设计阶段,为了提供可靠的设计方案,并缩短设计周期,应该对其进行分析模拟。音叉的结构参数至关重要,不仅会影响陀螺的敏感性,还会影响其检测精度和稳定性。本文以U形音叉为例,利用大型有限元分析软件ANSYS建立了微型石英音叉的实体模型,对其模态特性进行了分析和计算,分析了音叉几何尺寸对其谐振频率的影响,并提供了一组可供实际制作的音叉结构参数,大大缩短了设计周期。

Finite element analysis of modal characteristics of micro quartz tuning fork gyroscope

As a kind of new inertial instruments,MEMS quartz tuning fork gyroscope has been developed recently design.The tuning fork should be analyzed and simulated early in the design stage in order to offer reliable basis for design and to shorten the period of development.The framework parameter of the tuning fork is very important,it affects not only the sensitivity,but also the detecting precision and stability of the tuning fork,and it.Taking U-shape tuning fork as an example,and by means of finite element analysis software ANSYS,the solid model of a micro quartz tuning fork gyroscope is established.Then analyze and calculate the modal characteristics of the tuning fork,and analyze the relationship between the size of the tuning fork and the resonance frequency,and give a group of framework parameters that can be used in producing a real tuning fork,this shortens the design period sharply.