| Abstract: | In this paper, the coupling hysteresis and creep in piezoelectric actuators are identified and compensated for accurate tracking. First, we present the coupling hysteresis and creep model in smart actuators. Next, a complete identification strategy is designed according to the properties of the Preisach model. Then, an approach for parameter updating of the coupling model is provided. With the identified hysteresis and creep, the model‐based inversion compensation is designed. Finally, we apply the model identification and compensation to a piezoelectric stage to demonstrate the effectiveness of the proposed approaches. Significant reduction of the tracking error is achieved with the model‐based inversion feedforward compensator in which the relative errors at 10 Hz and 50 Hz are reduced to 1.85% and 4.53%, respectively. In addition, the model‐based feedforward is augmented with an integral feedback controller. With the composite controller, the relative errors at 10 Hz and 50 Hz are reduced to 0.42% and 3.04%, respectively. |
