| 氩气浓度对热丝法化学气相沉积纳米金刚石膜的影响 |
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| 引用本文： | 任瑛,张贵锋,侯晓多,姜辛.氩气浓度对热丝法化学气相沉积纳米金刚石膜的影响[J].机械工程材料,2009(11). |
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| 作者姓名： | 任瑛 张贵锋 侯晓多 姜辛 |
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| 作者单位： | 大连理工大学三束材料改性国家重点实验室材料科学与工程学院;德国锡根大学材料工程学院; |
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| 摘 要： | 采用热丝化学气相沉积方法,以Ar+CH4+H2混合气体作为气源,通过改变氩气浓度,在单晶硅(100)基片上沉积纳米金刚石膜;采用扫描电子显微镜、原子力显微镜、X射线衍射仪和拉曼光谱仪等分析了纳米金刚石膜的形貌、微结构以及残余应力。结果表明:随着氩气浓度的增大,膜的晶粒尺寸逐渐减小到纳米级;由于晶粒细化导致膜内残余应力由拉应力变为压应力,并且压应力随氩气浓度的增大呈现先增大后减小的趋势;当氩气体积分数为98%时,即在贫氢的气氛中成功获得了平均晶粒尺寸为54 nm、均方根粗糙度约为14.7 nm的纳米金刚石膜。
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| 关 键 词： | 纳米金刚石膜 热丝化学气相沉积 氩气浓度 |
Influence of Ar Concentration on Nano-crystalline Diamond Films Prepared by Hot-filament Chemical Vapor Deposition |
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| REN Ying,ZHANG Gui-feng,HOU Xiao-duo,JIANG Xin.Influence of Ar Concentration on Nano-crystalline Diamond Films Prepared by Hot-filament Chemical Vapor Deposition[J].Materials For Mechanical Engineering,2009(11). |
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| Authors: | REN Ying ZHANG Gui-feng HOU Xiao-duo JIANG Xin |
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| Affiliation: | REN Ying1,ZHANG Gui-feng1,HOU Xiao-duo1,JIANG Xin2(1.State Key Laboratory of Materials Modification by Electron,Ion and Laser Beams,School of Materials Science and Engineering,Dalian University of Technology,Dalian 116024,China,2.Institute of Materials Engineering,Siegen University,Siegen 57076,Germany) |
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| Abstract: | Nano-crystalline diamond(NCD) films were deposited on single crystal Si(100) with Ar+CH4+H2 gas mixtures as gas source using hot filament chemical vapor deposition method with different Ar volume fractions.The surface morphology,microstructure and residual stress of the nano-crystalline diamond films were analyzed by using SEM,AFM,XRD and Raman spectrometry.The results show that the grain sizes decreasd to nanometer dimensions with the increase of Ar volume fraction.The film residual stress transformed from... |
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| Keywords: | nano-crystalline diamond film hot filament chemical vapor deposition Ar concentration |
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