| 晶圆制造单元的Petri网建模和性能分析 |
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| 引用本文： | 周炳海,潘青枝,王世进.晶圆制造单元的Petri网建模和性能分析[J].计算机工程与应用,2006,42(35):222-225. |
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| 作者姓名： | 周炳海 潘青枝 王世进 |
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| 作者单位： | 上海交通大学,机械与动力工程学院,上海,200240;上海交通大学,机械与动力工程学院,上海,200240;上海交通大学,机械与动力工程学院,上海,200240 |
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| 基金项目： | 国家自然科学基金;教育部跨世纪优秀人才培养计划;上海市科委登山行动计划项目 |
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| 摘 要： | 晶圆制造是半导体制造过程中的一个重要环节,晶圆制造单元的性能直接影响晶圆制造的成本。为了有效地分析晶圆制造单元的动态性能,分别对加工设备存在瓶颈和搬运机器人存在瓶颈的两种情况,进行了赋时Petri网建模研究,建立了晶圆制造单元的赋时Petri网模型。在此基础上,进行了稳态生产率分析,同时用实例验证了模型的有效性和实用性。
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| 关 键 词： | 晶圆制造 赋时Petri网 建模 性能分析 |
| 文章编号： | 1002-8331（2006）35-0222-04 |
| 收稿时间： | 2006-03 |
| 修稿时间： | 2006-03 |
Modeling and Performance Analysis Using Petri Nets for Cluster Tools |
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| ZHOU Bing-hai,PAN Qing-zhi,WANG Shi-jin.Modeling and Performance Analysis Using Petri Nets for Cluster Tools[J].Computer Engineering and Applications,2006,42(35):222-225. |
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| Authors: | ZHOU Bing-hai PAN Qing-zhi WANG Shi-jin |
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| Affiliation: | School of Mechanical Engineering,Shanghai Jiaotong University,Shanghai 200240,China |
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| Abstract: | In semiconductor manufacturing,wafer fabrication is a key element,and its cost is affected by the performance of Wafer Fabrication Cluster Tool(WFCT) directly.In order to analyze dynamic performance of the WFCT effectively,a WFCT modeling method of timed Petri nets is studied in two cases-machine bottleneck and single blade robotic transporter bottleneck,and timed Petri net models of the WFCT are built.On the basis of mentioned above,steady-state throughputs of the WFCT are discussed.Finally the numerical examples are used to verify the validity and practicality of the models. |
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| Keywords: | wafer fabrication timed Petri nets modeling performance analysis |
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