计量圆光栅超微粒乳剂的涂布工艺

本文讨论了计量圆光栅超微粒乳剂涂布的工艺问题。在大量实验的基础上,提出了一种有效的计量圆光栅超微粒乳剂涂布方法:“动态旋转定量涂布法”,并取得了理想的实用效果。为获得大直径、高精度、高分辨率的计量圆光栅的母板,提供了一条新的途径。该方法同样适用于其它各种圆形光学元件的涂布。

The Rubberizing Technology of Ultramicron Emulsion of Metrological Radial Grating

The rubberizing technology of ultramicron emulsion of metrological radial grating is discussed in this paper. Through lots of experiments, an effective rubberizing method kinetic-spinning-quantitative rubberizing is suggested, which an ideal practical effect method. The method provides a new way to obtain a large diameter, high precision, high resolution mask of metrological radial grating. The method is suitable for method rubberizing any optical elements of circularity.