| 具有温度补偿的膜片型光纤光栅温度压力传感器 |
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| 引用本文： | 蔡安,印新达,常晓东,江山.具有温度补偿的膜片型光纤光栅温度压力传感器[J].传感器与微系统,2013,32(4). |
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| 作者姓名： | 蔡安 印新达 常晓东 江山 |
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| 作者单位： | 1. 武汉邮电科学研究院研究生院,湖北武汉430074;武汉理工光科股份有限公司,湖北武汉430223
2. 武汉理工光科股份有限公司,湖北武汉,430223 |
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| 摘 要： | 阐述了具有温度补偿结构的膜片型光纤光栅温度压力传感器。传感器以弹性膜片为感压元件,在压力作用下产生轴向位移来压缩压力敏感光栅以实现压力传感;通过结构温度补偿消除压力敏感光栅的温度漂移,同时串入感温光栅进行实时修正并实现温度测量。对传感器的压力和温度特性进行了测量。试验结果表明:压力灵敏度为528 pm/MPa,温度灵敏度为8 pm/℃。
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| 关 键 词： | 光纤光栅 压力传感器 弹性膜片 温度补偿 |
Optical fiber grating temperature and pressure sensor based on diaphragm with temperature compensation |
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| CAI An
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YIN Xin-da
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CHANG Xiao-dong
,
JIANG Shan.Optical fiber grating temperature and pressure sensor based on diaphragm with temperature compensation[J].Transducer and Microsystem Technology,2013,32(4). |
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| Authors: | CAI An YIN Xin-da CHANG Xiao-dong JIANG Shan |
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| Abstract: | Optical fiber grating temperature and pressure sensor based on diaphragm with temperature compensation is described.Elastic diaphragm acts as pressure sensing element,axial displacement occurs under pressure and compress pressure sensing grating to realize pressure sensing.Temperature compensation and active correction by add another temperature grating are adopted simultaneously to eliminate the thermal errors for the pressure grating.Besides,the temperature grating also is used for measuring temperature.Pressure and temperature characteristics of the sensor are measured.The experimental result shows that pressure sensitivity is 528 pm/MPa and temperature sensitivity is 8 pm/℃. |
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| Keywords: | optical fiber grating pressure sensor elastic diaphragm temperature compensation |
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