| MEMS集成滤波器技术 |
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| 引用本文： | 张永华,欧阳炜霞,刘蕾,郭兴龙,赖宗声,王硕.MEMS集成滤波器技术[J].传感器与微系统,2008,27(7). |
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| 作者姓名： | 张永华 欧阳炜霞 刘蕾 郭兴龙 赖宗声 王硕 |
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| 作者单位： | 1. 华东师范大学微电子电路与系统研究所,上海,200241
2. 同济大学软件学院,上海,200092 |
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| 基金项目： | 国家自然科学基金，上海市应用材料研究与发展基金 |
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| 摘 要： | 滤波器是频率转换系统(如,调谐电路、接收器)的基本构成模块。借助于MEMS技术实现的滤波器不仅带来插入损耗、功耗、线性等性能的改善,也有利于将整个通信前端集成到单一芯片上。综述了MEMS可调滤波器的研究进展。与单一利用MEMS电容的调变实现频率可调的滤波器相比,分形可调MEMS滤波技术有更小的插入损耗和更宽的调频范围。
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| 关 键 词： | 微电子机械系统 开关 变容器 可调滤波器 可重构滤波器 |
MEMS integrated filter technology |
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| ZHANG Yong-hua,OU-YANG Wei-xia,LIU Lei,GUO Xing-long,LAI Zong-sheng,WANG Shu.MEMS integrated filter technology[J].Transducer and Microsystem Technology,2008,27(7). |
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| Authors: | ZHANG Yong-hua OU-YANG Wei-xia LIU Lei GUO Xing-long LAI Zong-sheng WANG Shu |
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| Abstract: | Filters are the basic building blocks in frequency converting systems,such as tuners and receivers.Filters based on MEMS technology not only offer clear performances,such as low insertion loss and power loss,but also are useful for integrating the whole radio frequency front ends and transceivers on a chip.The recent development for MEMS tunable filters is summarized.Compared with the tunable MEMS filters only realized by tunable capacitor,the fractal tunable MEMS filters have lower loss and wider tuning range. |
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| Keywords: | microelectromechanical systems(MEMS) switch varactor tunable filter reconfigurable filter |
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