| PMMA基PCR微流控生物芯片准分子激光加工 |
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| 引用本文： | 祁恒,姚李英,王桐,陈涛,左铁钏. PMMA基PCR微流控生物芯片准分子激光加工[J]. 微细加工技术, 2006, 0(1): 16-19 |
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| 作者姓名： | 祁恒 姚李英 王桐 陈涛 左铁钏 |
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| 作者单位： | 北京工业大学,激光工程研究院,北京,100022 |
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| 基金项目： | 国家高技术研究发展计划(863计划);北京市自然科学基金 |
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| 摘 要： | 采用准分子激光在PMMA基片上刻蚀加工出PCR微流控生物芯片,分析了准分子激光能量密度和工作台移动速度对微通道加工质量(深度及粗糙度)的影响,加工过程中选择较低的激光能量密度和较高的工作台移动速度,都有利于获得底面更加光滑的微通道。通过热键合的方法制备出完整的密闭式PCR微流控生物芯片。
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| 关 键 词： | 微加工 微流控生物芯片 准分子激光 聚合酶链式反应 |
| 文章编号： | 1003-8213(2006)01-0016-04 |
| 修稿时间： | 2005-06-16 |
Excimer Laser Micromachining of PMMA Based on PCR Micro-fluidic Biologic Chip |
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| QI Heng,YAO Li-ying,WANG Tong,CHEN Tao,ZUO Tie-chuan. Excimer Laser Micromachining of PMMA Based on PCR Micro-fluidic Biologic Chip[J]. Microfabrication Technology, 2006, 0(1): 16-19 |
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| Authors: | QI Heng YAO Li-ying WANG Tong CHEN Tao ZUO Tie-chuan |
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| Abstract: | PCR micro-fluidic biologic chip was fabricated on PMMA substrate by using excimer laser.The impact of excimer laser's fluence and the stage velocity on microchannel's qualities including depth and roughness was analysed.Smoother microchannel could be etched by using lower laser fluence and stage velocity.The whole sealed PMMA based on PCR micro-fluidic biologic chip was bonded by hotpress methed. |
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| Keywords: | micromachining micro-fluidic biologic chip polymerase chain reaction(PCR) excimer laser |
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