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具有隔离器功能的激光干涉仪的研究
引用本文:王林斗,王加新,邢文烈,李玉峰.具有隔离器功能的激光干涉仪的研究[J].光学精密工程,2004,12(5):465-470.
作者姓名:王林斗  王加新  邢文烈  李玉峰
作者单位:天津大学,电子信息工程学院,天津300072;天津大学,电子信息工程学院,天津300072;天津大学,电子信息工程学院,天津300072;天津大学,电子信息工程学院,天津300072
基金项目:Supportedbynationalnaturalsciencefoundationofchina (No .6 99770 14 )
摘    要:提出了一种具有隔离器功能的激光干涉仪.既可以进行干涉测量,又具有隔离器功能,可以防止反射光回到光源,使光源保持稳定,确保了测量精度.该干涉仪由常规干涉仪和双级隔离器的结构有机的结合起来,其中某些元件合二为一,使一个元件起到双重功能的作用,同时使干涉光路和隔离光路也相互重合起来.理论分析和实验研究表明:该方案是可行的.隔离度与双级隔离器的隔离度相同,达到了48dB.该装置的干涉测量精度与一般干涉仪一样取决于激光波长,但该装置结构紧凑,简化了测量系统,实际使用更为方便.

关 键 词:激光干涉仪  隔离功能  干涉测量
收稿时间:2004-07-19
修稿时间:2004-08-16

Laser interferometer with isolator function
Abstract.Laser interferometer with isolator function[J].Optics and Precision Engineering,2004,12(5):465-470.
Authors:Abstract
Affiliation:School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China
Abstract:A laser interferometer with isolator function is proposed. It can be used to carry out interference measurement, and at the same time can be prevent reflected light from returning into the laser source to stabilize the source as an isolator does, thus the measurement accuracy can be guaranteed. So, the structure of the device is formed by organic combing two structures of the conventional interferometer and two-stage isolator, in which some elements can be combined two into one with double function. And the optical paths of the interference measurement and isolating are overlapped. Theoretic analysis and experiment results show that the device is effective, the isolation is agrees with that of a two-stage isolator, about 48 dB up to now. The results also show that the accuracy of the interference measurement depends on the wavelength of the laser like that of the general interferometer. But with compact structure, it simplifies the measurement system and is convenient for practical uses.
Keywords:laser interferometer  isolating function  interference measurement
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