| HgCdTe器件中pn结结区扩展的表征方法 |
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| 引用本文： | 翁彬,周松敏,王溪,陈奕宇,李浩,林春. HgCdTe器件中pn结结区扩展的表征方法[J]. 红外与毫米波学报, 2017, 36(1): 54-59 |
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| 作者姓名： | 翁彬 周松敏 王溪 陈奕宇 李浩 林春 |
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| 作者单位： | 中科院上海技术物理研究所,中科院上海技术物理研究所 |
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| 摘 要： | 报道了液氮温度下激光束诱导电流(LBIC)和I-V测试两种在HgCdTe器件中pn结结区扩展的表征方法.通过LBIC和I-V测试,发现了p型HgCdTe材料中由B+离子注入成结和干法刻蚀成结对材料造成的损伤使得有效结区范围大于注入和刻蚀面积,并获得n区横向扩展.同时,通过对比,相互印证两种方法得到的测试结果一致.
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| 关 键 词： | HgCdTe；激光束诱导电流；I-V测试；B+离子注入；干法刻蚀 |
| 收稿时间： | 2015-12-22 |
| 修稿时间： | 2016-02-19 |
Characterization method of PN junction region expansion in HgCdTe device |
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| WENG Bin,ZHOU Song-Min,WANG Xi,CHEN Yi-Yu,LI Hao and Lin Chun. Characterization method of PN junction region expansion in HgCdTe device[J]. Journal of Infrared and Millimeter Waves, 2017, 36(1): 54-59 |
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| Authors: | WENG Bin ZHOU Song-Min WANG Xi CHEN Yi-Yu LI Hao Lin Chun |
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| Affiliation: | Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai Institute of Technical Physics,Chinese Academy of Sciences |
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| Abstract: | The laser beam induced current (LBIC) and the I-V test at liquid-nitrogen temperature were applied to characterize the PN junction region extension effect in the HgCdTe device processing. By LBIC and I-V test, it was found that the area of n-type region of p-type HgCdTe material implanted by Boron ion or etched by ion beam milling is larger than the nominal values. The transverse dimension of n-type region was measured. At the same time, it was found that the results obtained by both methods were comparable. |
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| Keywords: | HgCdTe laser beam induced current I-V test Boron ion implantation dry etching |
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