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Low-Temperature Growth of the CdS Cubic Phase by Atomic-Layer Deposition on SiC/Si Hybrid Substrates |
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| Authors: | Kukushkin S A Osipov A V Romanychev A I Kasatkin I A Loshachenko A S |
| Affiliation: | 1.Institute for Problems in Mechanics, Russian Academy of Sciences, 199178, St. Petersburg, Russia ;2.Peter the Great St. Petersburg Polytechnic University, 195251, St. Petersburg, Russia ;3.St. Petersburg State University, 199034, St. Petersburg, Russia ; |
| Abstract: | Technical Physics Letters - A new method for epitaxial growth of cadmium sulfide (CdS) films in the metastable cubic phase by atomic-layer deposition on silicon substrates with a buffer layer of... |
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