An optically powered wireless telemetry module for high-temperature MEMS sensing and communication |
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Authors: | Suster M Ko WH Young DJ |
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Affiliation: | Electr. Eng. & Comput. Sci. Dept., Case Western Reserve Univ., Cleveland, OH, USA; |
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Abstract: | A high-temperature, low-power silicon tunnel diode oscillator transmitter with an on-board optical power converter is proposed for harsh environment MEMS sensing and wireless data telemetry applications. The prototype sensing and transmitting module employs a MEMS silicon capacitive pressure sensor performing pressure to frequency conversion and a spiral loop serving as an inductor for the LC tank resonator and also as a transmitting antenna. A GaAs photodiode converts an incoming laser beam to an electrical energy for powering the prototype design. The system achieves a telemetry performance up to 250/spl deg/C over a distance of 1.5 m with a transmitter power consumption of approximately 60 /spl mu/W. |
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