| 铝台阶/氟化锂激光压缩复合靶的制备与测量 |
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| 引用本文： | 叶君建,谢志勇,黄秀光,杜艾,舒桦,方智恒,傅思祖.铝台阶/氟化锂激光压缩复合靶的制备与测量[J].原子能科学技术,2013,47(11):2146-2151. |
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| 作者姓名： | 叶君建 谢志勇 黄秀光 杜艾 舒桦 方智恒 傅思祖 |
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| 作者单位： | 1.上海激光等离子体研究所，上海201800；2.同济大学 上海市特殊人工微结构材料与技术重点实验室，上海200092 |
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| 摘 要： | 本文主要介绍用于激光加载材料非冲击压缩实验研究中的铝台阶/氟化锂复合靶的制备与相关参数的测量。铝台阶/氟化锂复合靶主要通过光学抛光减薄、离子束刻蚀台阶、表面减反膜制备、铝薄膜的精密轧制以及薄膜精密装配等加工技术与工艺流程制备。制备的铝台阶/氟化锂复合靶基本满足物理实验要求，获得了较好的实验结果。
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| 关 键 词： | 激光 非冲击压缩 铝 氟化锂 离子束刻蚀 |
Fabrication and Measurement of Al-step/LiF Laser Compression Composite Target |
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| YE Jun-jian,XIE Zhi-yong,HUANG Xiu-guang,DU Ai,SHU Hua,FANG Zhi-heng,FU Si-zu.Fabrication and Measurement of Al-step/LiF Laser Compression Composite Target[J].Atomic Energy Science and Technology,2013,47(11):2146-2151. |
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| Authors: | YE Jun-jian XIE Zhi-yong HUANG Xiu-guang DU Ai SHU Hua FANG Zhi-heng FU Si-zu |
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| Affiliation: | 1.Shanghai Institute of Laser Plasma, Shanghai 201800, China; 2.Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, Tongji University, Shanghai 200092, China |
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| Abstract: | The fabrication and measurement of Al-step/LiF composite targets were presented, which are usually used in laser drive shockless compression experiments. Al-step/LiF composite targets were prepared with the processes including optical polishing, ion beam etching, antireflection film coating, precision rolling of the Al films and precise micro-assembly. The prepared Al-step/LiF composite targets met the demand of experiments, and obtained very good experimental results. |
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| Keywords: | laser shockless compression Al LiF ion beam etching |
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