| 低温热处理制备掺铝氧化锌薄膜技术的研究 |
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| 引用本文： | 王鑫博,王维,黄特. 低温热处理制备掺铝氧化锌薄膜技术的研究[J]. 沈阳理工大学学报, 2014, 0(1): 63-65 |
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| 作者姓名： | 王鑫博 王维 黄特 |
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| 作者单位： | 沈阳工业大学理学院,辽宁沈阳110870 |
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| 摘 要： | 使用溶胶-凝胶法在玻璃基底上制备掺铝氧化锌薄膜,研究热处理温度对薄膜结构、形貌、电学性能的影响。结果表明:使用低温热处理制备的薄膜具有更好的C轴取向生长,表面平整质密,面阻最小达到1800Ω/□。
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| 关 键 词： | 溶胶一凝胶 掺铝氧化锌 薄膜 低温 热处理 |
Study on Low Temperature Thermal Treatment Preparation Technology of Aluminum Doped Zinc Oxide Thin Films |
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| WANG Xinbo,WANG Wei,HUANG Te. Study on Low Temperature Thermal Treatment Preparation Technology of Aluminum Doped Zinc Oxide Thin Films[J]. Transactions of Shenyang Ligong University, 2014, 0(1): 63-65 |
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| Authors: | WANG Xinbo WANG Wei HUANG Te |
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| Affiliation: | ( School of Science, Shenyang University of Technology, Shenyang 110870, China) |
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| Abstract: | Using sol-gel method A1 doped zinc oxide thin films is prepared on glass sub- strate. The influence of heat treatment temperature on thin film structure, pattern, electricity function is studied. The results show that： The films prepared by low temperature themal treatment have better growth of C axis orientation, smooth and dense surface and the minimum of surface resistance reached 1800Ω/□. |
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| Keywords: | sol-gel aluminum doped zinc oxide thin film low temperature heat treatment |
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