| 温度监控装置在CVD金刚石膜沉积设备中的应用 |
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| 引用本文： | 刘秀军,孙振路,吴晓波,王少岩,何奇宇,胡红彦,杨卫正.温度监控装置在CVD金刚石膜沉积设备中的应用[J].河北省科学院学报,2008,25(1):38-41. |
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| 作者姓名： | 刘秀军 孙振路 吴晓波 王少岩 何奇宇 胡红彦 杨卫正 |
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| 作者单位： | 河北省激光研究所,河北,石家庄,050081 |
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| 摘 要： | 介绍了一种温度监控装置,并结合其在等离子体喷射CVD金刚石膜沉积设备中的使用情况,论述了该温度监控装置的工作原理,给出了监控的驱动电路,并对该电路进行了分析,最后在沉积结果中选取了两种典型的金刚石膜晶粒形貌做了比较,经过多次沉积实验证明,本温度监控装置的引入大大降低了值班人员的劳动强度,明显改善了金刚石膜的质量和完整性,提高了产品的出材率.
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| 关 键 词： | 温度监控 红外测温仪 遥控 信号发射器 信号接收器 |
| 文章编号： | 1001-9383(2008)01-0038-04 |
| 修稿时间： | 2007年11月10 |
The application of temperature monitoring set in CVD diamond jet |
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| LIU Xiu-jun,SUN Zhen-lu,WU Xiao-bo,WANG Shao-yan,HE Qi-yu,HU Hong-yan,YANG Wei-zheng.The application of temperature monitoring set in CVD diamond jet[J].Journal of The Hebei Academy of Sciences,2008,25(1):38-41. |
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| Authors: | LIU Xiu-jun SUN Zhen-lu WU Xiao-bo WANG Shao-yan HE Qi-yu HU Hong-yan YANG Wei-zheng |
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| Affiliation: | Hebei Institute of Laser;Shijiazhuang Hebei050081;China |
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| Abstract: | This paper introduces a temperature monitoring device.The working principle of the temperature monitoring device was discussed combining with the application in CVD diamond deposition system,then the drive circuit of the temperature monitoring device was given and analysed.In the end according to comparison with two typical morphology of the grains of diamond and deposition experiments,it is approved that the introduction of the alarm device on duty has greatly reduced the labor intensity and the quality an... |
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| Keywords: | Temperature monitoring Infrared thermometer Remote control Signal Transmitter Signal Receiver |
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