| 金刚石基微机电系统制备方法的研究进展 |
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| 引用本文： | 鲁云祥,满卫东,罗红泰,陈梦唤,陈培钦.金刚石基微机电系统制备方法的研究进展[J].金刚石与磨料磨具工程,2018,38(4):20-26. |
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| 作者姓名： | 鲁云祥 满卫东 罗红泰 陈梦唤 陈培钦 |
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| 作者单位： | 等离子体化学与新材料湖北省重点实验室 武汉工程大学, 武汉 430073 |
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| 基金项目： | 国家自然科学基金（No.11175137）。 |
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| 摘 要： | 金刚石由于其独特的物理、化学和电学性质，以及以薄膜形式生长的可行性，是制造可靠、长寿命，微机电/纳米机电系统（MEMS/NEMS）材料的理想选择。近年来化学气相沉积金刚石薄膜生长的进展促进了金刚石在微机电系统的应用，实现了基于金刚石的MEMS和NEMS开发的新时代。但是由于其难以精确加工，目前仍未能大规模应用。本文对当前金刚石基MEMS的研究进展进行了阐述，主要探讨了当前主要应用的金刚石基MEMS系统的加工方法，并进行了进一步的展望。
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| 关 键 词： | 金刚石 微机电系统 激光加工 等离子体刻蚀 |
Research progress of preparation methods of diamond-based MEMS |
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| LU Yunxiang,MAN Weidong,LUO Hongtai,CHEN Menghuan,CHEN Peiqin.Research progress of preparation methods of diamond-based MEMS[J].Diamond & Abrasives Engineering,2018,38(4):20-26. |
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| Authors: | LU Yunxiang MAN Weidong LUO Hongtai CHEN Menghuan CHEN Peiqin |
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| Affiliation: | Hubei Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan 430073, China |
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| Abstract: | Due to its unique physical, chemical, and electrical properties and the feasibility of growing in the form of thin films, diamond is an ideal material for manufacturing reliable and long-life micro-electromechanical/nanoelectromechanical systems (MEMS/NEMS). In recent years, the development of chemical vapor deposition of diamond thin film has promoted the application of diamond in MEMS and realized a new era of development of diamond-based MEMS and NEMS. However, due to the difficulty in precise processing, diamond has not yet been widely applied in NEMS/MEMS. In this article,the current research progress of diamond-based MEMS is introduced, as well as the processing methods of diamond-based MEMS system. The prospect of diamond application in MEMS is proposed. |
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