基于旋转谐振结构的单芯片二维电场传感器

提出并研制了一种二维电场检测传感芯片,将四个电场测量微型单元和旋转式驱动微结构集成在3. 5 mm ×3. 5 mm的敏感结构上,实现了单芯片的电场二维测量.介绍了传感器的工作原理、敏感结构的设计,以及基于绝缘体上硅( SOI)工艺的单芯片微型二维电场传感器制备工艺技术.成功研制出传感器原理样机,研究了微型二维电场传感器的标定方法,开发了用于电场二维标定的测试装置,并在室温常压下对传感器进行了二维标定.实验结果表明:该传感器能够有效减小电场的轴间耦合干扰,测量误差优于7. 04%,线性度可达到1. 25%.

Monolithic two-dimensional electric field sensor based on rotary resonant structure

A two-dimensional electric field detecting sensing chip is presented,researched and fabricated,which integrates four electric field measurement micro unit and rotary driving micro structure on 3. 5 mm × 3. 5 mm sensitive structure to realize monolithic two-dimensional electric field measurement. Working principle of the sensor,design of sensing structure and fabrication technology of monolithic two-dimensional electric field micro sensor based on SOI process are introduced. The prototype of the proposed sensor is successfully fabricated,and the calibration method and the calibration equipment are developed to conduct two-dimensional calibration experiments at room temperature and ordinary pressure. The test results show that the proposed sensor effectively eliminates the cross-axis coupling interference of electric field,and measurement error is prior to 7. 04%,and the linearity can achieve 1. 25%.