High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta2O5 films |
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Authors: | Cheng Xu Qiling Xiao Jianyong Ma Yunxia Jin Zhengxiu Fan |
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Affiliation: | a Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China b Graduate School, Chinese Academy of Sciences, Beijing 100049, China |
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Abstract: | Ta2O5 films were deposited by conventional electron beam evaporation method and then annealed in air at different temperature from 873 to 1273 K. It was found that the film structure changed from amorphous phase to hexagonal phase when annealed at 1073 K, then transformed to orthorhombic phase after annealed at 1273 K. The transmittance was improved after annealed at 873 K, and it decreased as the annealing temperature increased further. The total integrated scattering (TIS) tests and AFM results showed that both scattering and root mean square (RMS) roughness of films increased with the annealing temperature increasing. X-ray photoelectron spectroscopy (XPS) analysis showed that the film obtained better stoichiometry and the O/Ta ratio increased to 2.50 after annealing. It was found that the laser-induced damage threshold (LIDT) increased to the maximum when annealed at 873 K, while it decreased when the annealing temperature increased further. Detailed damaged models dominated by different parameters during annealing were discussed. |
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Keywords: | Ta2O5 films Annealing Laser-induced damage threshold Scattering Absorption |
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