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A microfluidic device for thermal particle detection |
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| Authors: | Ashwin Kumar Vutha Benyamin Davaji Chung Hoon Lee Glenn M Walker |
| Affiliation: | 2. Department of Mechanical, Aerospace, and Nuclear Engineering, Rensselaer Polytechnic Institute, 2112 Jonsson Engineering Center, Troy, NY, 12180, USA 3. Department of Electrical and Computer Engineering, Marquette University, 1515 W Wisconsin Ave., Milwaukee, WI, 53233, USA 1. Joint Department of Biomedical Engineering, UNC Chapel Hill and NC State University, 911 Oval Drive, Raleigh, NC, 27695, USA |
| Abstract: | We demonstrate the use of heat to count microscopic particles. A thermal particle detector (TPD) was fabricated by combining a 500-nm-thick silicon nitride membrane containing a thin-film resistive temperature detector with a silicone elastomer microchannel. Particles with diameters of 90 and 200 μm created relative temperature changes of 0.11 and ?0.44 K, respectively, as they flowed by the sensor. A first-order lumped thermal model was developed to predict the temperature changes. Multiple particles were counted in series to demonstrate the utility of the TPD as a particle counter. |
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