| 镜面面型误差的曲面方程处理方法 |
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| 引用本文： | 吴清文. 镜面面型误差的曲面方程处理方法[J]. 光学精密工程, 1998, 6(6): 56-60 |
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| 作者姓名： | 吴清文 |
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| 作者单位： | 中国科学院长春光学精密机械研究所 |
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| 摘 要： | 在论述Zernike多项式的优缺点的基础上,提出用曲面方程处理方法来处理镜面面型。最后,讨论了曲面方程法的适应性和局限性。
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| 关 键 词： | 面型 误差 最小二乘法 均方根 |
| 收稿时间： | 1998-10-15 |
Treating with Surface Figure Error of Mirror/Lens by Means of Surface Equation |
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| WU Qing Wen. Treating with Surface Figure Error of Mirror/Lens by Means of Surface Equation[J]. Optics and Precision Engineering, 1998, 6(6): 56-60 |
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| Authors: | WU Qing Wen |
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| Affiliation: | Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022 |
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| Abstract: | The advantage and disadvantage of Zernike polynomials is stated, and an approach to treating with the surface figure error of mirror/lens by means of surface equation is presented. The advantage and limitation of the method is discussed. |
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| Keywords: | Surface figure Error Least squares method Root of Mean Squares (RMS.) |
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