| CVD法制备高质量金刚石单晶研究进展 |
| |
| 引用本文： | 刘晓晨,郭辉,安晓明,李义锋,姜龙.CVD法制备高质量金刚石单晶研究进展[J].人工晶体学报,2017,46(10):1897-1901. |
| |
| 作者姓名： | 刘晓晨 郭辉 安晓明 李义锋 姜龙 |
| |
| 作者单位： | 河北省激光研究所,石家庄 050081;河北普莱斯曼金刚石科技有限公司,石家庄050081 |
| |
| 摘 要： | 本文介绍了制备单晶金刚石的主要方法并对其进行了对比,从籽晶选择、预处理和生长工艺几个方面综述了微波等离子体化学气相沉积法制备金刚石单晶的研究进展,并简单介绍了目前国内外在单晶金刚石制备上的进展,最后对CVD金刚石单晶在电子领域的应用进行了展望.
|
| 关 键 词： | 微波等离子体 化学气相沉积(CVD) 金刚石单晶 |
Progress of High Quality Diamond Single Crystal Prepared by CVD Method |
| |
| LIU Xiao-chen,GUO Hui,AN Xiao-ming,LI Yi-feng,JIANG Long.Progress of High Quality Diamond Single Crystal Prepared by CVD Method[J].Journal of Synthetic Crystals,2017,46(10):1897-1901. |
| |
| Authors: | LIU Xiao-chen GUO Hui AN Xiao-ming LI Yi-feng JIANG Long |
| |
| Abstract: | Main method of preparation of single crystal diamond and carries on their comparison was introduced , the research progress of the preparation of diamond single crystal by microwave plasma chemical vapor deposition were reviewed from the choice of seed crystal , pretreatment and synthetic technology , and introduces the progress in preparation of single crystal diamond at home and abroad , the last application of CVD single crystal diamond in the electronic field was prospected . |
| |
| Keywords: | Main method of preparation of single crystal diamond and carries on their comparison was introduced the research progress of the preparation of diamond single crystal by microwave plasma chemical vapor deposition were reviewed from the choice of seed crystal pretreatment and synthetic technology and introduces the progress in preparation of single crystal diamond at home and abroad the last application of CVD single crystal diamond in the electronic field was prospected |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《人工晶体学报》浏览原始摘要信息 |
|
点击此处可从《人工晶体学报》下载全文 |
|
