| 硅压力传感器静态特性参数计算机标定系统 |
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| 引用本文： | 乔景庄,刘恩科,张声良. 硅压力传感器静态特性参数计算机标定系统[J]. 传感器与微系统, 1995, 0(1): 34-39 |
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| 作者姓名： | 乔景庄 刘恩科 张声良 |
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| 作者单位： | 西安交通大学 |
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| 摘 要： | 介绍可标定６４路压力传感器静态特性参数的计算机标定系统。数据采集精度可达０．０５％，可得出传感器的非线性、迟滞、重复性、零位输出、零位温漂、灵敏度、温漂特性参数。该系统还可用于压力传感器的温漂补偿。补偿后压力传感器零位＜０．５ｍＶ，零位温漂＜５×１０－５／℃Ｆ．Ｓ。
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| 关 键 词： | 压力传感器，静态特性，标定系统，温漂，补偿 |
Computer Calibrating System for Static Characteristic of Solid State Piezoresistive Pressure Transducer |
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| Qiao Jingzhuang, Liu Enke, Zhang Shengliang. Computer Calibrating System for Static Characteristic of Solid State Piezoresistive Pressure Transducer[J]. Transducer and Microsystem Technology, 1995, 0(1): 34-39 |
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| Authors: | Qiao Jingzhuang Liu Enke Zhang Shengliang |
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| Affiliation: | Xi'an Jiaotong Uaiversity |
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| Abstract: | The system has been developed for calibrating static chacteristic parameters of of transducers. The accuracy of data collectal can reach the letal of 0.05%. The nonlinerity, the hystensis, the repeaterility, the zero balance, the zero thermal shift and the sensitivity thermal shift can be obtained. It can also be used for compensation of thermal shift. After compensation, zero balance<0.5mV, thermal shift<5×10(-5)/℃ F. S. |
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| Keywords: | Pressure transducer Static characteristic Calibrating system Thermal shift Compensation |
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